Liehr, Michael books & textbook
Ultraclean Semiconductor Processing Technology and Surface Chemical Cleaning and Passivation: Symposium Held April 17-19, 1995, San Francisco, ... Research Society Symposium Proceedings)
Liehr, Michael Heyns, Marc Hirose, Masataka Parks, Harold
Materials Research Society / Hardcover / 411 Pages
isbn-10: 1558992898 / isbn-13: 9781558992894
