Brodie, Ivor books & textbook
The Physics of Micro/Nano-Fabrication (Microdevices)
Springer /2010-12-06 Paperback / 642 Pages
isbn-10: 1441932216 / isbn-13: 9781441932211
The Physics of Microfabrication
Springer /2013-06-26 Paperback / 524 Pages
isbn-10: 1489921621 / isbn-13: 9781489921628