Alain C. Diebold Thomas J. Shaffner David G. Seiler books & textbook
Characterization and Metrology for ULSI Technology: 2003: 2003 International Conference on Characterization and Metrology for ULSI Technology (AIP Conference Proceedings, 683)
Alain C. Diebold Thomas J. Shaffner David G. Seiler
American Institute of Physics /2003-01-01 Hardcover / 818 Pages
isbn-10: 0735401527 / isbn-13: 9780735401525
