ISBN 9783642082726 books & textbook
Ultraclean Surface Processing of Silicon Wafers: Secrets of VLSI Manufacturing
Hattori, Takeshi Hattori, T. Heusler, S. Webb, J.P.
Springer /2010-12-07 Paperback / 644 Pages
isbn-10: 3642082726 / isbn-13: 9783642082726
