ISBN 9783527335008 books & textbook
Micro Process Engineering: Fundamentals, Devices, Fabrication, and Applications (Advanced Micro and Nanosystems)
Kockmann, Norbert Brand, Oliver Fedder, Gary K. Hierold, Christofer Korvink, Jan G.
Vch Pub /2014-07-21 Paperback / 529 Pages
isbn-10: 3527335005 / isbn-13: 9783527335008
