ISBN 9783527314942 books & textbook
Reliability of MEMS: Testing of Materials and Devices
Tabata, Osamu Tsuchiya, Toshiyuki Brand, Oliver Fedder, Gary K. Hierold, Christofer Korvink, Jan G.
Wiley-VCH /2008-02-04 Hardcover / 324 Pages
isbn-10: 3527314946 / isbn-13: 9783527314942
