ISBN 9781566771368 books & textbook
Proceedings of the Second International Symposium om Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing (Proceedings ; v. 97-9)
M. Meyyappan, D. J. Econonou, S. W. Butler (eds.)
Electrochemical Society /1997T Hardcover / 347 Pages
isbn-10: 1566771366 / isbn-13: 9781566771368
