ISBN 9781558998209 books & textbook
Chemical-Mechanical Planarization: Volume 867: Integration, Technology and Reliability (MRS Proceedings)
Johns, E. C. Kumar, A. Lee, J. A. Obeng, Y. S. Vos, I.
Materials Research Society /2005-07-19 Hardcover / 302 Pages
isbn-10: 1558998209 / isbn-13: 9781558998209
