ISBN 9780819475213 books & textbook
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV (Proceedings of Spie)
Chiao, Jung-Chih Hariz, Alex J. Thiel, David V. Yang, Changyi
Society of Photo Optical /2008-01-01 Paperback / 306 Pages
isbn-10: 0819475211 / isbn-13: 9780819475213