ISBN 9780819456106 books & textbook
Micro and Nanotechnology: Materials, Processes, Packaging, and Systems II (Proceedings of Spie)
Chiao, Jung-Chih Jamieson, David N. Faraone, Lorenzo Dzurak, Andrew S.
Society of Photo Optical /2005-02-28 Paperback / 620 Pages
isbn-10: 0819456101 / isbn-13: 9780819456106