ISBN 9780819449764 books & textbook
Smart Sensors, Actuators, and Mems (Proceedings of Spie)
Chiao, Jung-Chih Varadan, Vijay K. Cane, Carles
Society of Photo Optical /2003-07-30 Paperback / 970 Pages
isbn-10: 0819449768 / isbn-13: 9780819449764
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