ISBN 9780819420077 books & textbook
Microelectronic Structures and Microelectromechanical Devices: 24 October, 1995, Austin, Texas (Proceedings of Spie--The International Society for Optical Engineering, V. 2641.)
Semiconductor Equipment and Materials International National Institute of Standards and Technology (U. S.) Society of Photo-Optical Instrumentation Engineers Bailey, Wayne E. Motamedi, M. Edward Luo, Fang-Chen
Society of Photo Optical / Paperback / 154 Pages
isbn-10: 0819420077 / isbn-13: 9780819420077
