ISBN 9780198562870 books & textbook
Plasma Etching: Fundamentals and Applications (Series on Semiconductor Science and Technology)
Sugawara, M. Stansfield, Barry L. Handa, S. Fujita, K. Watanabe, S. Tsukamoto, T.
Oxford University Press /1998-07-30 Hardcover / 356 Pages
isbn-10: 019856287X / isbn-13: 9780198562870
