ISBN 9780127521725 books & textbook
Chemical Mechanical Polishing in Silicon Processing (Volume 63) (Semiconductors and Semimetals, Volume 63)
Hwa Li, Shin M. Miller, Robert M. Willardson, R. K. Weber, Eicke R.
Academic Press /1999-10-29 Hardcover / 307 Pages
isbn-10: 0127521720 / isbn-13: 9780127521725
