ISBN 3527334998 books & textbook
CMOS - MEMS (Advanced Mirco & Nanosystems)
Baltes, Henry Brand, Oliver Fedder, Gary K. Hierold, Christofer Korvink, Jan G. Tabata, Osamu
Wiley-VCH /2014-07-21 Paperback / 608 Pages
isbn-10: 3527334998 / isbn-13: 9783527334995
