ISBN 352733498X books & textbook
Enabling Technology for MEMS and Nanodevices: Advanced Micro and Nanosystems
Baltes, Henry Brand, Oliver Fedder, Gary K. Hierold, Christofer Korvink, Jan G. Tabata, Osamu
Wiley-VCH /2014-07-21 Paperback / 439 Pages
isbn-10: 352733498X / isbn-13: 9783527334988
