ISBN 3527316981 books & textbook
LIGA and its Applications (Advanced Micro and Nanosystems)
Saile, Volker Wallrabe, Ulrike Tabata, Osamu Korvink, Jan G. Brand, Oliver Fedder, Gary K. Hierold, Christofer
Wiley-VCH /2009-01-07 Hardcover / 490 Pages
isbn-10: 3527316981 / isbn-13: 9783527316984
