ISBN 1605112267 books & textbook
Advanced Interconnects and Chemical Mechanical Planarization for Micro- and Nanoelectronics: Volume 1249 (MRS Proceedings)
Bartha, J. W. Borst, C. L. DeNardis, D. Kim, K. Naeemi, A. Nelson, A. Papa Rao, S. S. Ro, H. W. Toma, D.
Materials Research Society /2010-10-05 Hardcover / 342 Pages
isbn-10: 1605112267 / isbn-13: 9781605112268
