ISBN 156396967X books & textbook
Characterization and Metrology for ULSI Technology 2000: International Conference (AIP Conference Proceedings, 550)
Alain C. Diebold D. G. Seiler David G. Seiler
American Institute of Physics /2001-03-01 Hardcover / 723 Pages
isbn-10: 156396967X / isbn-13: 9781563969676
