ISBN 1558995137 books & textbook
Materials Science of Microelectromechanical Systems (MEMS) Devices II: Volume 605 (MRS Proceedings)
de Boer, Maarten P. Heuer, Arthur H. Jacobs, S. Joshua Peeters, Eric
Cambridge University Press /2000-10-02 Hardcover / 314 Pages
isbn-10: 1558995137 / isbn-13: 9781558995130
