ISBN 0819470570 books & textbook
Micromachining and Microfabrication Process Technology XIII (Proceedings of Spie)
Maher, Mary-ann Chiao, Jung-Chih Resnick, Paul J.
Society of Photo Optical /2008-01-01 Paperback / 150 Pages
isbn-10: 0819470570 / isbn-13: 9780819470577
