ISBN 0819465763 books & textbook
Reliability, Packaging, Testing, and Characterization of Mems/ Moems VI (Proceedings of Spie)
Hartzell, Allyson L. Ramesham, Rajeshuni
Society of Photo Optical /2007-06-15 Paperback / 246 Pages
isbn-10: 0819465763 / isbn-13: 9780819465764