ISBN 0819465755 books & textbook
Micromachining Technology for Micro-optics and Nano-optics V + Microfabrication Process Technology XII (Proceedings of Spie)
Maher, Mary-ann Stewart, Harold D. Chiao, Jung-Chih Suleski, Thomas J. Johnson, Eric G.
Society of Photo Optical /2007-06-15 Paperback / 370 Pages
isbn-10: 0819465755 / isbn-13: 9780819465757