ISBN 0819434728 books & textbook
Materials and Device Characterization in Micromachining II: 20-21 September 1999 Santa Clara, California (Proceedings of Spie, Volume 3875)
Society of Photo-Optical Instrumentation Engineers Solid State Technology (Organization) Vladimirsky, Yuli Friedrich, Craig R.
Society of Photo Optical /1999-08-01 Paperback / 256 Pages
isbn-10: 0819434728 / isbn-13: 9780819434722