ISBN 0819431532 books & textbook
Optical Microlithography XII: Proceedings of Spie 17-19 March 1999 Santa Clara, California (Proceedings of Spie--The International Society for Optical Engineering, V. 3334.)
Society of Photo-Optical Instrumentation Engineers Semiconductor Equipment and Materials International Hove, Luc Van Den
Society of Photo Optical / Paperback / 1182 Pages
isbn-10: 0819431532 / isbn-13: 9780819431530
