ISBN 0815512201 books & textbook
Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions (Materials Science and Process Technology)
Rossnagel, Stephen M. Westwood, William D. Cuomo, Jerome J.
William Andrew /1991-01-14 Hardcover / 546 Pages
isbn-10: 0815512201 / isbn-13: 9780815512202