ISBN 0309045975 books & textbook
Plasma Processing of Materials: Scientific Opportunities and Technological Challenges
National Research Council Division on Engineering and Physical Sciences Commission on Physical Sciences, Mathematics, and Applications Board on Physics and Astronomy Plasma Science Committee Panel on Plasma Processing of Materials
National Academies Press /1991-02-01 Paperback / 88 Pages
isbn-10: 0309045975 / isbn-13: 9780309045971
