ISBN 0198562837 books & textbook
Nanotechnology: Integrated Processing Systems for Ultra-precision and Ultra-fine products (Oxford Science Publications)
Taniguchi, Norio Kohno, Tsuguo Maruyama, Kazuo Iizuka, Kiyoshi Miyamoto, Iwao Dohi, Toshio
Oxford University Press /1996-09-26 Hardcover / 422 Pages
isbn-10: 0198562837 / isbn-13: 9780198562832