ISBN 9781605112763 books & textbook
Microelectromechanical Systems - Materials and Devices IV: Volume 1299 (MRS Proceedings)
DelRio, Frank W. de Boer, Maarten P. Eberl, Christoph Gusev, Evgeni
Cambridge University Press /2011-05-02 Hardcover / 220 Pages
isbn-10: 1605112763 / isbn-13: 9781605112763
