ISBN 9780819423788 books & textbook
Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39)
Harry J. Levinson Mark A. McCord Franco Cerrina Robert D. Allen John G. Skinner Andrew R. Neureuther Martin C. Peckerar F. Keith Perkins Michael J. Rooks P. Rai-Choudhury
Society of Photo-Optical Instrumentation Engineers /1997-03-14 Hardcover / 768 Pages
isbn-10: 0819423785 / isbn-13: 9780819423788
