ISBN 9780819421029 books & textbook
Optical Microlithography IX: Proceedings : 13-15 March 1996 Santa Clara, California (Proceedings of Spie--The International Society for Optical Engineering, V. 2726.)
Society of Photo-Optical Instrumentation Engineers Semiconductor Equipment and Materials International Sematech (Organization) Fuller, Gene E.
Society of Photo Optical / Paperback
isbn-10: 0819421022 / isbn-13: 9780819421029
