ISBN 9780819420053 books & textbook
Micromachining and Microfabrication Process Technology: 23-24 October, 1995, Austin, Texas (Proceedings of Spie--The International Society of Optical Engineering, V. 2639.)
Semiconductor Equipment and Materials International National Institute of Standards and Technology (U. S.) Society of Photo-Optical Instrumentation Engineers Markus, Karen W.
Society of Photo Optical /1995T Paperback
isbn-10: 0819420050 / isbn-13: 9780819420053
