ISBN 9780819417879 books & textbook
Integrated Circuit Metrology, Inspection and Process Control IX: 20-22 February 1995, Santa Clara, California (Proceedings of Spie--The International Society for Optical Engineering, V. 2439.)
Society of Photo-Optical Instrumentation Engineers Semiconductor Equipment and Materials International Bennett, Mary
Society of Photo Optical / Hardcover
isbn-10: 0819417874 / isbn-13: 9780819417879
