ISBN 9780819417855 books & textbook
Electron-Beam, X-Ray, Euv, and Ion-Beam Submicrometer Lithographies for Manufacturing V: 20-21 February 1995 Santa Clara, California (Proceedings of ... Society for Optical Engineering, V. 2437.)
Society of Photo-Optical Instrumentation Engineers Semiconductor Equipment and Materials International Warlaumont, John M.
Society of Photo Optical /1995-06-01 Paperback / 450 Pages
isbn-10: 0819417858 / isbn-13: 9780819417855
