ISBN 1558993738 books & textbook
Defects and Diffusion in Silicon Processing: Volume 469 (MRS Proceedings)
Rubia, Tomas Diaz de la Coffa, Salvatore Rafferty, Conor S. Stolk, Peter A.
Materials Research Society /1997-11-21 Hardcover / 541 Pages
isbn-10: 1558993738 / isbn-13: 9781558993730
