ISBN 0892524987 books & textbook
Advanced semiconductor processing and characterization of electronic and optical materials: January 24-25, 1984, Los Angeles, California (Proceedings ... Society for Optical Engineering)
Sadana, Devendra K. (Editor); Lampert, Carl M. (Editor)
SPIE--the International Society for Optical Engineering /1984T Paperback / 147 Pages
isbn-10: 0892524987 / isbn-13: 9780892524983