ISBN 0819474509 books & textbook
Micromachining and Microfabrication Process Technology XIV (Proceedings of Spie)
Maher, Mary-ann Chiao, Jung-Chih Resnick, Paul J.
Society of Photo Optical /2009-01-01 Paperback
isbn-10: 0819474509 / isbn-13: 9780819474506
