ISBN 0819420085 books & textbook
Micromachined Devices and Components 23 24 October 1995: 23-24 October, 1995, Austin, Texas (Proceedings of Spie--The International Society for Optical Engineering, V. 2642.)
Semiconductor Equipment and Materials International Society of Photo-Optical Instrumentation Engineers National Institute of Standards and Technology (U. S.) Roop, Ray Chau, Kevin
Society of Photo Optical / Paperback
isbn-10: 0819420085 / isbn-13: 9780819420084
